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作者:

Wang, Yunxin (Wang, Yunxin.) (学者:王云新) | Wang, Dayong (Wang, Dayong.) (学者:王大勇) | Zhao, Jie (Zhao, Jie.) | Li, Yan (Li, Yan.) | Wan, Yuhong (Wan, Yuhong.) (学者:万玉红)

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摘要:

Digital holographic microscopy (DHM) is proposed for the three-dimensional (3D) profile measurement of the micro-optical components, which is characterized by its non-invasion, non-contact, high-speed, and full-wave field scheme. Firstly, the configuration of lensless Fourier-transform DHM is designed and built. The complex amplitude of the full-wave field is reconstructed by a single inverse fast Fourier transform only. The phase aberration is corrected by the two-step phase subtraction method, and the unwrapped phase information is extracted by using the least-squares phase-unwrapping algorithm. Then the profile information of the sample can be obtained. In the experiments, the profile of the micro-lens arrays is measured by the proposed configuration, and the results show that the caliber and relief depth are 1.595 mm and 2.424 μm respectively. These are in good agreement with the results given by the white-light interferometer. It demonstrates that the lensless Fourier-transform DHM is feasible and effective for the 3D profile measurement of the micro-optical components.

关键词:

Phase measurement Microlenses Aberrations Least squares approximations Holography Microoptics Microscopic examination Fast Fourier transforms Inverse problems

作者机构:

  • [ 1 ] [Wang, Yunxin]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
  • [ 2 ] [Wang, Yunxin]Institute of Information Photonics Technology, Beijing University of Technology, Beijing 100124, China
  • [ 3 ] [Wang, Dayong]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
  • [ 4 ] [Wang, Dayong]Institute of Information Photonics Technology, Beijing University of Technology, Beijing 100124, China
  • [ 5 ] [Zhao, Jie]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
  • [ 6 ] [Zhao, Jie]Institute of Information Photonics Technology, Beijing University of Technology, Beijing 100124, China
  • [ 7 ] [Li, Yan]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
  • [ 8 ] [Li, Yan]Institute of Information Photonics Technology, Beijing University of Technology, Beijing 100124, China
  • [ 9 ] [Wan, Yuhong]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
  • [ 10 ] [Wan, Yuhong]Institute of Information Photonics Technology, Beijing University of Technology, Beijing 100124, China

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来源 :

Acta Optica Sinica

ISSN: 0253-2239

年份: 2011

期: 4

卷: 31

被引次数:

WoS核心集被引频次: 0

SCOPUS被引频次: 22

ESI高被引论文在榜: 0 展开所有

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