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摘要:
Pull-in parameters analysis, such as pull-in voltage and pull-in displacement, of contact type electrostatically actuated MEMS switches is investigated. Using Euler-Bernoulli beam theory, a cantilever beam model is established. Based on the method of Galerkin decomposition, the model is changed to a discrete modal equations, including nonlinear electrostatic force. Based on the equilibrium stability analysis, pull-in voltage and pull-in displacement are discussed. The simulation results can be used as design tools and rules to improve switch performance. © 2011 Springer-Verlag Berlin Heidelberg.
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来源 :
Advances in Intelligent and Soft Computing
ISSN: 1867-5662
年份: 2011
卷: 111
页码: 633-639
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