Effect of oxygen pressures on microstructure and electrical property of LaNiO3 thin films by PLD - 文章详情页

作者：

Wang, Guang-Ming (Wang, Guang-Ming.) | Zhang, Ming (Zhang, Ming.) | Li, Ting-Xian (Li, Ting-Xian.) | Guo, Hong-Rui (Guo, Hong-Rui.) | Yan, Hui (Yan, Hui.)

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摘要：

LaNiO3　thin　films　were　deposited　on　Si　(100)　substrate　by　pulsed　laser　deposition(PLD)　with　different　oxygen　pressures.　X-ray　diffraction　(XRD)　analysis　show　that　the　LaNiO3　thin　films　have　highly　(100)-oriented　by　controlling　oxygen　pressures.　Oxygen　pressures　have　a　great　influence　on　the　crystallinity　of　the　LaNiO3　thin　films,　and　the　film　has　the　best　crystallinity　when　the　oxygen　pressure　is　7.5Pa,　the　stoichiometric　ratio　of　La　to　Ni　element　go　down　as　the　growing　of　oxygen　pressures,　the　smallest　resistivity　of　the　LaNiO3　thin　films　is　2.03　×　10-4　Ω　·　cm,　it　shows　a　good　conductivity　of　metallic　perovskite　oxide;　SEM　and　TEM　analysis　show　that　crystal　grain　of　the　film　is　columnar　morphology,　revealed　smooth　dense　surfaces　and　very　homogeneous　grain　distribution.　Compacted　and　clearly　well-defined　grain　size　can　also　be　observed.　RMS　of　LaNiO3　films　is　1.73nm,　which　could　be　acceptable　for　most　of　the　possible　applications　of　LaNiO3,　for　example　as　an　electrode　in　ferroelectric(FE)　thin　films.

关键词：

Electric properties Thin films X ray diffraction analysis Perovskite X ray diffraction Ferroelectric films Semiconducting silicon compounds Oxygen Vapor deposition Programmable logic controllers Metallic compounds Film growth Pulsed laser deposition

作者机构：

[ 1 ] [Wang, Guang-Ming]The College of Materials Science and Engineering, Beijing University of Technology, Beijing 100124, China
[ 2 ] [Zhang, Ming]The College of Materials Science and Engineering, Beijing University of Technology, Beijing 100124, China
[ 3 ] [Li, Ting-Xian]The College of Materials Science and Engineering, Beijing University of Technology, Beijing 100124, China
[ 4 ] [Guo, Hong-Rui]The College of Materials Science and Engineering, Beijing University of Technology, Beijing 100124, China
[ 5 ] [Yan, Hui]The College of Materials Science and Engineering, Beijing University of Technology, Beijing 100124, China

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