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Refractory metal tungsten tubes of different diameter have been prepared successfully by chemical vapor deposition with the mixture of WF6 and H2. The purity, density, micro-hardness, residual stress and strength of tungsten tubes at different deposition temperatures (500°C, 600°C, 700°C) were tested and analyzed. The results show that tungsten tubes prepared in this way demonstrate high purity and high density. At different deposition temperatures, micro-hardness values of tungsten tube of different radius (3-20 mm) change between 500 and 800 HV. A relatively high residual stress exists along the tungsten tube circumference, radius of the direction. And the tensile strength range is 300-500 MPa.
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