The development of electrohydrodynamic micropump - 文章详情页

作者：

Yu, He (Yu, He.) | Yu, Jian (Yu, Jian.) | Ma, Chong-Fang (Ma, Chong-Fang.)

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摘要：

The　development　of　electrohydrodynamic　(EHD)　micropump　was　introduced.　The　fabrication　process　of　EHD　micropump　was　presented　from　the　material　selection,　optimal　design　of　microelectrode　and　assembly　process.　PDMS　was　used　making　micro　fluid　channel　through　the　casting　molding　process.　Anodic　bonding　was　used　in　micropump　assembly　packing.　Flow　experiment　was　carried　out　on　ethyl　alcohol.　The　results　indicate　that　the　EHD　micropump　can　achieve　a　maximum　flow　rate　is　92　uL/min　at　applied　voltage　of　90　V.

关键词：

Electrohydrodynamics Microchannels Microelectrodes Pulse width modulation Electronic cooling Packing

作者机构：

[ 1 ] [Yu, He]Education Ministry Key Lab. of Enhanced Heat Transfer and Energy Conservation, College of Environmental and Energy Engineering, Beijing University of Technology, Beijing 100124, China
[ 2 ] [Yu, Jian]Education Ministry Key Lab. of Enhanced Heat Transfer and Energy Conservation, College of Environmental and Energy Engineering, Beijing University of Technology, Beijing 100124, China
[ 3 ] [Ma, Chong-Fang]Education Ministry Key Lab. of Enhanced Heat Transfer and Energy Conservation, College of Environmental and Energy Engineering, Beijing University of Technology, Beijing 100124, China

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