An　improved　inductor　layout　with　non-uniform　metal　width　and　non-uniform　spacing　is　proposed　to　increase　the　quality　factor　(Q　factor).　For　this　inductor　layout,　from　outer　coil　to　inner　coil,　the　metal　width　is　reduced　by　an　arithmetic-progression　step,　while　the　metal　spacing　is　increased　by　a　geometric-progression　step.　An　improved　layout　with　variable　width　and　changed　spacing　is　of　benefit　to　the　Q　factor　of　RF　spiral　inductor　improvement　(approximately　42.86%),　mainly　due　to　the　suppression　of　eddy-current　loss　by　weakening　the　current　crowding　effect　in　the　center　of　the　spiral　inductor.　In　order　to　increase　the　Q　factor　further,　for　the　novel　inductor,　a　patterned　ground　shield　is　used　with　optimized　layout　together.　The　results　indicate　that,　in　the　range　of　0.5　to　16　GHz,　the　Q　factor　of　the　novel　inductor　is　at　an　optimum,　which　improves　by　67%　more　than　conventional　inductors　with　uniform　geometry　dimensions　(equal　width　and　equal　spacing),　is　enhanced　by　nearly　23%　more　than　a　PGS　inductor　with　uniform　geometry　dimensions,　and　improves　by　almost　20%　more　than　an　inductor　with　an　improved　layout.　©　2011　Chinese　Institute　of　Electronics.