Study on data processing method of high precision micro-tensile stage - 文章详情页

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To　deal　with　the　problem　of　large　system　error　of　the　micro-tensile　stage　and　improve　its　measurement　accuracy,　several　data　processing　methods　are　studied　in　this　paper.　Through　the　design　of　high　speed　and　high　accuracy　data　acquisition　system,　comparing　the　linear　regression,　polynomial　fitting,　subsection　fitting　and　point-by-point　comparison　methods,　the　author　can　get　the　advantages　and　disadvantages　of　these　methods　in　system　error　correction.　All　data　processing　methods　can　be　realized　by　VC++　programming　and　also　can　be　dealt　on　line.　Experimental　results　show　that　flexible　use　of　these　methods　can　effectively　improve　the　measurement　accuracy　for　the　micro-tensile　stage.

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Data acquisition Data handling Data processing Error correction

作者机构：

[ 1 ] [Chen, Dai-Xie]Graduate University of Chinese Academy of Sciences, Beijing 100049, China
[ 2 ] [Chen, Dai-Xie]Micro and Nano Fabrication Laboratory, Institute of Electrical Engineering of Chinese Academy of Sciences, Beijing 100190, China
[ 3 ] [Chu, Ming-Zhang]Micro and Nano Fabrication Laboratory, Institute of Electrical Engineering of Chinese Academy of Sciences, Beijing 100190, China
[ 4 ] [Lin, Yun-Sheng]Micro and Nano Fabrication Laboratory, Institute of Electrical Engineering of Chinese Academy of Sciences, Beijing 100190, China
[ 5 ] [Han, Li]Micro and Nano Fabrication Laboratory, Institute of Electrical Engineering of Chinese Academy of Sciences, Beijing 100190, China
[ 6 ] [Zhang, Yue-Fei]Institute of Microstructure and Property of Advanced Materials, Beijing University of Technology, Beijing 100124, China
[ 7 ] [Mao, Sheng-Cheng]Institute of Microstructure and Property of Advanced Materials, Beijing University of Technology, Beijing 100124, China

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