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Metal grids are used to solve the current spreading problem in coherently coupled implant-defined vertical cavity surface emitting laser (VCSEL) arrays. In-phase mode operation with a near-diffraction-limited beam is achieved in hexagonal 19-element arrays. The measured beamwidth of the arrays is as low as 1.3 degrees, which is only about 1.08 times of the diffraction limit. The arrays can maintain a relatively high proportion of 29.2% average power in the central lobe from threshold to maximum output power. The narrow beamwidth and high power proportion benefit from the uniform near-field optical intensity owing to the metal grids. This technique provides an alternative method to realize large-area in-phase coherently coupled VCSEL array with high beam quality.
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