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A series of CuCr1-xMgxO2 (0≤x≤0.09) thin films were deposited on quartz substrates using radio frequency magnetron sputtering. The structures, optical and electrical properties of CuCr0.91Mg0.09O2 thin films were investigated by diffractometry, double-beam spectrophotometry, electrical property measurement, respectively. XRD pattern indicates that all films are of 3R polycrystalline delafossite phase with good crystallinity after annealing. The conductivity of film has a notable improvement with increasing Mg. The conductivity at room temperature is 6.16×10-2 S/cm for x=0.09 which is nearly 400 times higher than that undoped CuCrO2 film. The p-type nature of films is confirmed by Hall measurements. The temperature dependence of electrical conductivity agrees well with the Arrhenius rule in the range of 200-300 K for all samples, and the minimum activation energy is 0.034 eV with x=0.09. Both average transmittance and optical band gap of CuCr1-xMgxO2 films decrease with the increase of Mg concentration.
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