The method to measure the nonlinearity in laser heterodyne interferometer - 文章详情页

作者：

Chen, Hong-Fang (Chen, Hong-Fang.) | Zhong, Zhi (Zhong, Zhi.) | Ding, Xue-Mei (Ding, Xue-Mei.)

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摘要：

To　reduce　or　restrain　the　nonlinearity　in　laser　heterodyne　interferometer　via　adjusting　optical　component,　the　mechanism　and　the　method　of　measuring　nonlinearity　need　to　be　researched.　Based　on　the　spectrum　analysis　of　the　measurement　signal,　a　method　to　measure　the　nonlinearity　is　proposed.　With　the　model　of　the　amplitude　relationship　between　the　nonlinearity　and　measurement　signal,　the　first　harmonic　nonlinearity　and　the　second　harmonic　nonlinearity　are　counted.　Then,　the　nonlinearity　is　measured　accurately.　The　experimental　result　shows　that　the　method　can　measure　the　nonlinearity　accurately　and　can　easily　be　adopted.

关键词：

Spectrum analysis Interferometers Heterodyning

作者机构：

[ 1 ] [Chen, Hong-Fang]College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing 100124, China
[ 2 ] [Zhong, Zhi]College of Information and Communication Engineering, Graduate School of Harbin Engineering University, Harbin 150001, China
[ 3 ] [Ding, Xue-Mei]Institute of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China

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