Study on properties of 2000 lp/mm X-ray transmission varied line-space gratings - 文章详情页

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摘要：

The　manufacture　of　high-line-density　X-ray　transmission　self-focusing　varied　line-space　(VLS)　gratings　for　X-ray　spectroscopy　by　using　electron　beam　lithography　is　reported.　Firstly,　the　VLS　gratings　are　automatically　optimized　and　generated　by　the　macro　program.　Then　using　the　electron　beam　lithography　and　micro-electroplating　technology,　the　VLS　gratings　are　fabricated　on　polyimide　membrane　substrate.　The　2000　lp/mm　X-ray　transmission　VLS　gratings　are　successfully　obtained.　It　can　be　seen　that　the　line　space　of　the　gratings　are　all　desired.　The　calibration　results　of　diffraction　efficiency　of　the　VLS　gratings　indicate　that　the　VLS　gratings　have　promising　abilities　to　significantly　improve　the　diffraction　intensity　and　spectrum　resolution　in　the　central　wavelength.

关键词：

Electron beam lithography Diffraction Diffraction gratings X ray spectroscopy Electron optics Electron beams

作者机构：

[ 1 ] [Jin, Feifei]Key Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
[ 2 ] [Jin, Feifei]Institute of Laser Engineering, Beijing University of Technology, Beijing 100022, China
[ 3 ] [Zhu, Xiaoli]Key Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
[ 4 ] [Li, Hailiang]Key Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
[ 5 ] [Li, Hailiang]Institute of Laser Engineering, Beijing University of Technology, Beijing 100022, China
[ 6 ] [Ma, Jie]Key Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
[ 7 ] [Xie, Changqing]Key Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
[ 8 ] [Liu, Shibing]Institute of Laser Engineering, Beijing University of Technology, Beijing 100022, China

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