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作者:

Chen, Hong-Fang (Chen, Hong-Fang.) | Zhong, Zhi (Zhong, Zhi.) | Ding, Xue-Mei (Ding, Xue-Mei.)

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摘要:

To compensate the nonlinear errors of heterodyne interferometers in nanometer measurement, an experimental investigation is conducted. Based on the polarization properties of a coated corner-cube retro-reflector, a model is derived for describing the effect of the axial rotation of a measuring cube-corner retro-reflector in the motion direction on the first-harmonic nonlinearity when a laser emits the elliptical polarized light. The simulation results indicate that the first-harmonic nonlinearity can be reduced by the axial rotation of the cube-corner retro reflector. The experimental result shows that the first harmonic nonlinearity is reduced from 3.48 to 1.39 nm when the axial orientation rotation angle of the measuring cube-corner retro reflector increases from 0° to 100°, which is 40% that of the original one. The method simplies the complexes of light path and circuit systems for nonlinear error compensation approaches.

关键词:

Error compensation Geometry Harmonic analysis Heterodyning Interferometers Interferometry Light measurement Light polarization Reflection

作者机构:

  • [ 1 ] [Chen, Hong-Fang]College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing 100124, China
  • [ 2 ] [Zhong, Zhi]College of Information and Communication Engineering, Graduate School, Harbin Engineering University, Harbin 150001, China
  • [ 3 ] [Ding, Xue-Mei]Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China

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来源 :

Optics and Precision Engineering

ISSN: 1004-924X

年份: 2010

期: 5

卷: 18

页码: 1043-1047

被引次数:

WoS核心集被引频次: 0

SCOPUS被引频次: 11

ESI高被引论文在榜: 0 展开所有

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