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摘要:
Based on the micro-phase separation and self-assembly of polymer blends, a mask, in which many nano-holes distribute regularly, is developed from PS/PMMA blend film to fabricate microstructure on GaP surface by wet etching. By employing this method on LED surface, when the diameter of the nano-holes in mask is around 500 nm and the etch depth is 140 nm, the LED output power increases by 18% in average.
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来源 :
Journal of Optoelectronics Laser
ISSN: 1005-0086
年份: 2009
期: 5
卷: 20
页码: 580-582
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