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摘要:
The optical performance of AlGaInP light emitting diodes(LEDs) with different surface structure has been simulated using transmission matrix formalism. PECVD and magnetron sputtering ITO are used to fabricate LEDs with different surface structures on DBR epilayer substrates. The test results show that the LEDs with coupled antireflection coatings of λ/4n SiON and λ/2n ITO have the best optical performance. At 20 mA injection current, the vertical output light intensity is 141.7 mcd, and the luminous flux is 0.4733 lm. Compared with the same structural LEDs without antireflection coatings, the vertical output light intensity and the luminous flux are greatly improved by a factor of 138% and 91% respectively.
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来源 :
Journal of Optoelectronics Laser
ISSN: 1005-0086
年份: 2009
期: 2
卷: 20
页码: 174-177
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