The　aligned　TiO2　nanotube　thin　films　were　fabricated　on　the　Ti　substrate　in　0.5　mol/L　NH4HF2　and　1.0　mol/L　NH4H2PO4　aqueous　solution　via　anodic　oxidation　method.　The　crystal　type　and　photo-induced　cathodic　protection　performance　were　investigated　after　the　TiO2　nanotube　thin　films　were　annealed　at　different　temperatures.　The　results　show　that　the　nanotubes　with　inner　diameter　of　80　nm,　outer　diameter　of　100　nm　and　length　of　2　μm　can　be　obtained　after　the　Ti　substrate　is　anodized　for　8　h　with　the　anodizing　voltage　of　20　V.　The　nanotube　structure　still　remains　even　after　being　annealed　at　600C,　and　their　open　circuit　potential　can　negatively　shift　to　about　-0.389　V(vs　SCE),　which　means　that　the　annealed　TiO2　nanotube　thin　films　have　excellent　photo-induced　cathodic　protection　properties.