Affect of ZnO thin film of pulsed laser deposition by substrate temperatures - 文章详情页

作者：

Chen, Jiangbo (Chen, Jiangbo.) | Wang, Li (Wang, Li.) (学者：王丽) | Su, Xueqiong (Su, Xueqiong.) | Liu, Hongmei (Liu, Hongmei.) | Wang, Rongping (Wang, Rongping.)

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摘要：

In　this　paper,　pulsed　laser　deposition　method　was　applied　to　grow　ZnO　films　in　different　temperature,　with　ZnO　ceramics　as　target,　sapphire　Al2O3　(0001)　for　substrate,　and　using　the　pulsed　laser　GCR-170　Nd:YAG　by　Spectra-Physics.　The　thin　film　structure　and　superficial　morphology　quality　have　been　researched　in　experiment　by　atomic　force　microscope　(AFM),　photoluminescence　(PL)　and　optical　transmission　spectrum,　and　optimize　growth　temperature　was　found　to　be　500C　at　which　the　ZnO　films　could　obtain　high-quality　surface.　The　high　violet　light　radiation　have　been　found　in　experiment.　The　optical　transmission　spectrum　versus　the　substrate　temperature　results　showed　that　for　the　ZnO　thin　films　prepared　on　sapphire,　the　surface　morphology　quality　of　the　ZnO　thin　film　was　enhanced　with　increasing　the　substrate　temperature　from　room　temperature　to　500C.

关键词：

Alumina Aluminum oxide Atomic force microscopy II-VI semiconductors Light transmission Materials Metallic films Morphology Neodymium lasers Optical films Oxide minerals Photoluminescence Plasma diagnostics Pulsed laser deposition Pulsed lasers Sapphire Surface morphology Thin films Transmissions Yttrium aluminum garnet Zinc oxide

作者机构：

[ 1 ] [Chen, Jiangbo]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
[ 2 ] [Wang, Li]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
[ 3 ] [Su, Xueqiong]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
[ 4 ] [Liu, Hongmei]College of Applied Sciences, Beijing University of Technology, Beijing 100124, China
[ 5 ] [Wang, Rongping]Laser Physics Centre, The Australian National University, ACT0200, Australia

通讯作者信息：

电子邮件地址：

lwang.1@bjut.edu.cn

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