The　fabrication　and　design　of　micro-electrodes　(the　key　component　of　Electrohydrodynamic　(EHD)　micropump)　using　MEMS　technology　are　studied　in　this　paper.　The　main　part　of　the　EHD　micropump　is　a　planar　electrode　array　composed　of　electrode　pairs　made　of　the　emitter　and　the　collector.　The　electrohydrodynamic　(EHD)　pump　uses　the　interaction　between　an　electric　field　and　electric　charges,　dipoles　or　particles　embedded　in　a　dielectric　fluid　to　drive　the　fluid.　The　major　key-controlling　variables　including　the　selection　of　electrode　materials,　diversification　of　electrode　geometrical　design,　comparison　of　different　fabrication　processes,　electroplating　and　kit-off　process　are　analyzed　systematically.　The　experimental　results　show　that　noble　metals　have　good　performance　of　resistance　for　corrosion　electrochemical　processes,　and　the　electrode　with　sharp　geometry　can　improve　the　performance　of　micropump.　It　also　shows　that　kit-off　process　is　better　than　electroplating　process　in　electrode　quality.