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作者:

Tian, Bo (Tian, Bo.) | Wu, Yu (Wu, Yu.) | Hu, Dongqing (Hu, Dongqing.) | Han, Feng (Han, Feng.) | Kang, Baowei (Kang, Baowei.)

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摘要:

A buried-oxide trench-gate bipolar-mode JFET (BTB-JFET) with an oxide layer buried under the gate region to reduce the gate-drain capacitance Cgd is proposed. Simulations with a resistive load circuit for power loss comparison at high frequency application are performed with 20V-rated power switching devices, including a BTB-JFET, a trench MOS-FET (T-MOSFET) generally applied in present industry, and a conventional trench-gate bipolar-mode JFET (TB-JFET) without buried oxide, for the first time. The simulation results indicate that the switching power loss of the normally-on BTB-JFET is improved by 37% and 14% at 1MHz compared to the T-MOSFET and the normally-on TB-JFET, respectively. In order to demonstrate the validity of the simulation, the normally-on TB-JFET and BTB-JFET have been fabricated successfully for the first time, where the buried oxide structure is realized by thermal oxidation. The experimental results show that the Cgd of the BTB-JFET is decreased by 45% from that of the TB-JFET at zero source-drain bias. Compared to the TB-JFET, the switching time and switching power loss of the BTB-JFET decrease approximately by 7.4% and 11% at 1MHz, respectively. Therefore, the normally-on BTB-JFET could be pointing to a new direction for the R and D of low voltage and high frequency switching devices.

关键词:

Capacitance Junction gate field effect transistors MOS devices Power MOSFET Silicon on insulator technology Switching Thermooxidation

作者机构:

  • [ 1 ] [Tian, Bo]Beijing University of Technology, Beijing 100124, China
  • [ 2 ] [Wu, Yu]Beijing University of Technology, Beijing 100124, China
  • [ 3 ] [Hu, Dongqing]Beijing University of Technology, Beijing 100124, China
  • [ 4 ] [Han, Feng]Beijing University of Technology, Beijing 100124, China
  • [ 5 ] [Kang, Baowei]Beijing University of Technology, Beijing 100124, China

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来源 :

Chinese Journal of Semiconductors

ISSN: 0253-4177

年份: 2008

期: 10

卷: 29

页码: 1860-1863

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