收录:
摘要:
A novel AlGalnP thin-film light emitting diode (LED) with an omni directional reflector structure is proposed and the corresponding fabrication process is developed. The omni-directional reflector was realized by the combination of a GaAs epi-wafer, SiO2 with conductive micro-contacts, and Au. The LED structure and Si substrate carrier were then brought into contact using silver loaded epoxy. Then, the GaAs substrate was removed and stopped on the etching stop layer. After the etching stop layer was removed, a thin AuGeNi electrode, the roughed surface, an ITO current spreading layer, a thick AuGeNi n-electrode, a AuZnAu p-electrode, and alloy were fabricated. The wafer was cut into 300 μm × 300 μm chips and then packaged into TO-18 without epoxy resin. For 20 mA driving current, the voltage is 2.2 V, and light intensity and light power respectively reach 195mcd and 3.78 mW, which is 3.6 times higher than the absorbing-substrate LEDs.
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来源 :
Chinese Journal of Semiconductors
ISSN: 0253-4177
年份: 2008
期: 4
卷: 29
页码: 751-753
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