To　obtain　the　kinematic　and　dynamic　characteristics　of　a　planar　5R　parallel　robot　with　physical　flexible　links　and　distributed　mass,　operating　at　higher　prescribed　input　speeds,　a　finite　element-based　differential　motion　equation　was　proposed.　Considering　the　kinematic　coupling　between　the　flexible　links　and　rigid　moving　platform,　a　modeling　method　suitable　for　the　mechanism　systems　which　contained　flexible　bodies　and　rigid　bodies　was　modified.　The　transformation　matrices　of　element　variables　were　derived　from　the　system　kinematics　property.　The　governing　equations　for　the　deflections　of　the　robot　members　were　obtained　using　the　Lagrange　equation.　The　set　of　equations　was　discretized　using　the　finite　element　method.　The　equations　derived　herein　give　a　more　accurate　model　by　including　additional　terms　as　Coriolis　damping,　centrifugal　stiffness　and　geometric　stiffness.　The　element　equations　were　transformed　and　assembled　to　generate　the　governing　differential　equations　for　the　robot.　In　this　manner　the　defects　brought　by　kinematic　and　dynamic　constraints　equations　were　avoided.　The　procedure　was　illustrated　by　a　detailed　analysis　of　a　planar　flexible　5R　parallel　robot.　The　model　can　be　used　for　Kineto-Elastodynamics　analysis　and　optimal　design.　The　flexibility　of　links　is　demonstrated　to　have　significant　impact　on　the　performance　and　stability　of　the　flexible　robots.