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摘要:
The film formation of viscous solutions in spin coating is numerically simulated in this paper. The influence of spin velocity of matrix, coating volume of droplet, surface tension coefficient and viscosity coefficient on film formation and its quality are analyzed. It is shown that the spin velocity of matrix and viscosity coefficient have great influence on film quality. Poorly set-up of spin velocity could bring film defects. It is easy to cause bigger pressure difference for overhigh viscosity coefficients and also make the film surface appear unstable state.
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来源 :
Journal of Beijing University of Technology
ISSN: 0254-0037
年份: 2008
期: SUPPL.
卷: 34
页码: 18-22