• 综合
  • 标题
  • 关键词
  • 摘要
  • 学者
  • 期刊-刊名
  • 期刊-ISSN
  • 会议名称
搜索

作者:

Yu, Hui-Ping (Yu, Hui-Ping.) | Sui, Yun-Kang (Sui, Yun-Kang.) | An, Guo-Ping (An, Guo-Ping.)

收录:

EI Scopus PKU CSCD

摘要:

In czochralski silicon with large diameter production, in order to improve the quality of crystal, a cusp magnetic field is often used to reduce melt convection. In this paper, Numerical method is used to analyze how coil radius, the distance between coils and the relative position between equal gauss surface and freedom surface effect melt convection, temperature distribution and the oxygen concentration distribution at growth interface. Results indicate that keeping the same magnetic field strength at the center point of the melt bottom, the radius of the loops and the distance between the loops have little effects on the flow, the temperature and oxygen concentration. When the equal gauss surface is under the freedom surface, the oxygen concentration is lower than that equal gauss surface is equal to the freedom surface. This is agreed with the experiment.

关键词:

Crystals Gaussian distribution Magnetic field effects Melting Numerical methods Oxygen Silicon

作者机构:

  • [ 1 ] [Yu, Hui-Ping]College of Mechanical Engineering and Applied Electronic Technology, Beijing University of Technology, Beijing 100022, China
  • [ 2 ] [Sui, Yun-Kang]College of Mechanical Engineering and Applied Electronic Technology, Beijing University of Technology, Beijing 100022, China
  • [ 3 ] [An, Guo-Ping]College of Mechanical Engineering and Applied Electronic Technology, Beijing University of Technology, Beijing 100022, China

通讯作者信息:

电子邮件地址:

查看成果更多字段

相关关键词:

来源 :

Journal of Beijing University of Technology

ISSN: 0254-0037

年份: 2008

期: SUPPL.

卷: 34

页码: 23-28

被引次数:

WoS核心集被引频次: 0

SCOPUS被引频次:

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

近30日浏览量: 1

在线人数/总访问数:45/3601704
地址:北京工业大学图书馆(北京市朝阳区平乐园100号 邮编:100124) 联系我们:010-67392185
版权所有:北京工业大学图书馆 站点建设与维护:北京爱琴海乐之技术有限公司