收录:
摘要:
In czochralski silicon with large diameter production, in order to improve the quality of crystal, a cusp magnetic field is often used to reduce melt convection. In this paper, Numerical method is used to analyze how coil radius, the distance between coils and the relative position between equal gauss surface and freedom surface effect melt convection, temperature distribution and the oxygen concentration distribution at growth interface. Results indicate that keeping the same magnetic field strength at the center point of the melt bottom, the radius of the loops and the distance between the loops have little effects on the flow, the temperature and oxygen concentration. When the equal gauss surface is under the freedom surface, the oxygen concentration is lower than that equal gauss surface is equal to the freedom surface. This is agreed with the experiment.
关键词:
通讯作者信息:
电子邮件地址:
来源 :
Journal of Beijing University of Technology
ISSN: 0254-0037
年份: 2008
期: SUPPL.
卷: 34
页码: 23-28
归属院系: