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作者:

He, Bin (He, Bin.) | Chen, Guang-Hua (Chen, Guang-Hua.) | Gao, Zhi-Hua (Gao, Zhi-Hua.) | Deng, Jin-Xiang (Deng, Jin-Xiang.) (学者:邓金祥) | Zhang, Wen-Jun (Zhang, Wen-Jun.)

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摘要:

BN thin film was prepared by RF sputtering on n-Si (100) wafer. We used ion implantation technique to introduce Be+ into BN thin film, and the film showed p-type semiconductor properties. We firstly used Van der Pauw method to measure the Hall Effect of the doped film at room temperature, and the film showed p-type conductivity which resistivity was around 10-3Ω·cm, mobility was 14-28 cm2/V·S, carrier concentration was 1019-1020 cm-3 and Hall coefficient was about 10-1 cm3/C. The p-BN/n-Si heterojunction showed obvious rectifier characteristics.

关键词:

Carrier concentration Cubic boron nitride Electric conductivity Hall effect Heterojunctions Ion implantation Silicon wafers Sputtering Thin films

作者机构:

  • [ 1 ] [He, Bin]School of Materials Science and Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 2 ] [Chen, Guang-Hua]School of Materials Science and Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 3 ] [Gao, Zhi-Hua]School of Materials Science and Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 4 ] [Deng, Jin-Xiang]School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China
  • [ 5 ] [Zhang, Wen-Jun]Department of Physics and Materials Science, City University of Hong Kong, Hong Kong, Hong Kong

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来源 :

Journal of Synthetic Crystals

ISSN: 1000-985X

年份: 2008

期: 2

卷: 37

页码: 504-506

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