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BN thin film was prepared by RF sputtering on n-Si (100) wafer. We used ion implantation technique to introduce Be+ into BN thin film, and the film showed p-type semiconductor properties. We firstly used Van der Pauw method to measure the Hall Effect of the doped film at room temperature, and the film showed p-type conductivity which resistivity was around 10-3Ω·cm, mobility was 14-28 cm2/V·S, carrier concentration was 1019-1020 cm-3 and Hall coefficient was about 10-1 cm3/C. The p-BN/n-Si heterojunction showed obvious rectifier characteristics.
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