In　this　paper,　in　order　to　investigate　the　residual　strain　relief　in　the　fatigued　copper　film　with　a　thickness　of　33　urn,　an　unconstraint　vibration　treatment　process　was　simulated　by　finite　element　(FE)　method.　The　experimental　processes,　including　fatigue　and　unconstraint　vibration　processes,　were　simulated.　The　fatigue　process　for　the　original　specimen　and　the　vibration　process　for　the　damaged　specimen　were　analyzed　by　the　static　and　transient　dynamic　analysis,　respectively.　The　simulation　results　showed　that　the　unconstraint　vibration　treatment　can　lead　to　the　residual　strain　of　the　fatigued　copper　film　to　be　reduced　and　redistributed.　The　effect　of　the　vibration　parameters　on　the　treatment　effectiveness　was　analyzed　by　the　different　fatigue　experiments　and　unconstraint　vibration　treatments,　and　the　results　showed　that　the　FE　simulation　results　are　in　agreement　with　the　experimental　observations.