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[期刊论文]

Some key problems in PMMA based PCR microfluidic biochip by excimer laser micromachining

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作者:

Chen, Tao (Chen, Tao.) (学者:陈涛) | Yao, Li-Ying (Yao, Li-Ying.) | Qi, Heng (Qi, Heng.) | 展开

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摘要:

The microfluidic polymerase chain reaction (PCR) biochip cycle circuit geometry is analyzed. For the general non-closed loop circuit paradigm, the feasible temperature zone arrangement is determined; for closed loop circuit paradigm, the heat exchange efficiency of several structural forms are described. Then the excimer laser etching on polymethyl methacrylate (PMMA) plate mechanism is studied, with the etching rate curves listing by experiments. For PCR biochip microchannel fabrication, the channel shape and the bottom surface roughness are mainly considered. Mask shape is designed to fit with the channel shape; laser polishing, near threshold energy etching and heat annealing for stress relief are adopted to promote the channel surface quality. For the problem of chip bonding, the hot press solution is utilized at last. The hot press bonding system is constructed, the optimal bonding parameters is acquired by tests. For driving and controlling of the micro continuous flow, a precise pneumatic syringe pump system is developed. By utilizing the PCR biochip and pump system, an experiment is performed and the amplified product of a 170 bp DNA template chain is successfully acquired.

关键词:

Bonding Microfluidics Pumps Biochips Excimer lasers Stress relief Surface roughness Temperature Etching Closed loop systems Pneumatics Annealing DNA Microchannels Polymethyl methacrylates Micromachining

作者机构:

  • [ 1 ] [Chen, Tao]College of Laser Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 2 ] [Yao, Li-Ying]College of Laser Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 3 ] [Qi, Heng]College of Laser Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 4 ] [Liu, Shi-Bing]College of Laser Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 5 ] [Wu, Jian]College of Laser Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 6 ] [Zuo, Tie-Chuan]College of Laser Engineering, Beijing University of Technology, Beijing 100022, China

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来源 :

Chinese Journal of Lasers

ISSN: 0258-7025

年份: 2007

期: SUPPL.

卷: 34

页码: 146-150

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