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作者:

Liu, Yuan-Xing (Liu, Yuan-Xing.) | Liu, Shi-Bing (Liu, Shi-Bing.) (学者:刘世炳) | Chen, Tao (Chen, Tao.)

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摘要:

Using 1D MED101 code, the competition mechanism between nonequilibrium electrostatic field ablation and thermal equilibrium ablation was analyzed when the pulsed laser with wavelength 1064 nm, pulse duration 1-20 ps, ablated copper in vacuum. Numerical simulation results revealed that when the pulse duration was short (1-5 ps), the nonequilibrium electrostatic field ablation occupies the ablation process, and that when the pulse duration become longer (10-20 ps), the thermal equilibrium ablation is the main process in the whole ablation. It also demonstrates that the maximum temperature of electrons versus time will have multi-peaks as the pulse duration and peak power density increase. Especially, the ablation depths of the nonequilibrium electrostatic field are 110 nm and 101 nm for pulse duration 1 ps and 5 ps respectively, 25 nm and 18 nm for pulse duration 10 ps and 20 ps respectively under the energy fluence 15 J/cm2.

关键词:

Targets Etching Computer simulation Laser ablation Electric fields Copper Laser pulses

作者机构:

  • [ 1 ] [Liu, Yuan-Xing]Institute of Laser Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 2 ] [Liu, Shi-Bing]Institute of Laser Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 3 ] [Chen, Tao]Institute of Laser Engineering, Beijing University of Technology, Beijing 100022, China

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来源 :

High Power Laser and Particle Beams

ISSN: 1001-4322

年份: 2007

期: 8

卷: 19

页码: 1271-1274

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