收录:
摘要:
Excessive phosphine is needed to get enough V/III ratio during common growth process of AlGaInP material by MOCVD in order to get crystal structure with high quality. AlGaInP was deposited by LP-MOCVD system with different phosphine flows (1000 ml/min and 400 ml/min, corresponding V/III ratios were 723 and 289), and the result was investigated by means of MOCVD in-situ software, double crystal X-ray diffraction system, photoluminescence (PL) and so on. It was observed that V/III ratio affects not only the growth rate of AlGaInP but also the crystal lattice mismatch between epitaxial material and GaAs substrate as well as optical properties of AlGalnP.
关键词:
通讯作者信息:
电子邮件地址:
来源 :
Semiconductor Optoelectronics
ISSN: 1001-5868
年份: 2007
期: 2
卷: 28
页码: 202-204
归属院系: