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作者:

Lin, Wei-Zhi (Lin, Wei-Zhi.) | Li, Jian-Jun (Li, Jian-Jun.) | Yu, Xiao-Dong (Yu, Xiao-Dong.) | Deng, Jun (Deng, Jun.) | Lian, Peng (Lian, Peng.) | Han, Jun (Han, Jun.) | Xing, Yan-Hui (Xing, Yan-Hui.) | Shen, Guang-Di (Shen, Guang-Di.)

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摘要:

Excessive phosphine is needed to get enough V/III ratio during common growth process of AlGaInP material by MOCVD in order to get crystal structure with high quality. AlGaInP was deposited by LP-MOCVD system with different phosphine flows (1000 ml/min and 400 ml/min, corresponding V/III ratios were 723 and 289), and the result was investigated by means of MOCVD in-situ software, double crystal X-ray diffraction system, photoluminescence (PL) and so on. It was observed that V/III ratio affects not only the growth rate of AlGaInP but also the crystal lattice mismatch between epitaxial material and GaAs substrate as well as optical properties of AlGalnP.

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来源 :

Semiconductor Optoelectronics

ISSN: 1001-5868

年份: 2007

期: 2

卷: 28

页码: 202-204

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