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作者:

Fu, Chun-he (Fu, Chun-he.) | Lu, Hui-li (Lu, Hui-li.) | Sun, Shao-rui (Sun, Shao-rui.) (学者:孙少瑞)

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Scopus SCIE CSCD

摘要:

6H-SiC is an important semiconductor material. The 6H-SiC wafer is always exposed to a high-humidity environment and the effect from the absorbed water molecule and some relative adsorbates is not negligible. Here, the oxygen and water molecules absorbed on the 6H-SiC(0001) surface and the dissociation process were studied with density functional theory. On the 6H-SiC(0001) surface, absorbed O-2 is spontaneously dissociated into O*, which is absorbed on a hollow site, and further transforms the 6H-SiC(0001) surface into SiO2. The absorbed H2O is spontaneously broken into OH* and H*, which are both absorbed on the top of the Si atom, and OH* is further reversibly transformed into O* and H*. The H* could saturate the dangling Si bond and change the absorption type of O*, which could stabilize the 6H-SiC(0001) surface and prevent it from transforming into SiO2.

关键词:

Density functional theory H2O absorption Dangling Si bond 6H-SiC(0001) surface Stability

作者机构:

  • [ 1 ] [Fu, Chun-he]China Elect Technol Grp Corp, Res Inst 45, Beijing 100176, Peoples R China
  • [ 2 ] [Lu, Hui-li]Beijing Univ Technol, Coll Environm & Energy Engn, Beijing Key Lab Green Catalysis & Separat, Beijing 100124, Peoples R China
  • [ 3 ] [Sun, Shao-rui]Beijing Univ Technol, Coll Environm & Energy Engn, Beijing Key Lab Green Catalysis & Separat, Beijing 100124, Peoples R China

通讯作者信息:

  • 孙少瑞

    [Sun, Shao-rui]Beijing Univ Technol, Coll Environm & Energy Engn, Beijing Key Lab Green Catalysis & Separat, Beijing 100124, Peoples R China

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来源 :

CHINESE JOURNAL OF CHEMICAL PHYSICS

ISSN: 1674-0068

年份: 2019

期: 4

卷: 32

页码: 451-456

1 . 0 0 0

JCR@2022

ESI学科: PHYSICS;

ESI高被引阀值:123

被引次数:

WoS核心集被引频次: 4

SCOPUS被引频次: 5

ESI高被引论文在榜: 0 展开所有

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