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Author:

Fu, Chun-he (Fu, Chun-he.) | Lu, Hui-li (Lu, Hui-li.) | Sun, Shao-rui (Sun, Shao-rui.) (Scholars:孙少瑞)

Indexed by:

Scopus SCIE CSCD

Abstract:

6H-SiC is an important semiconductor material. The 6H-SiC wafer is always exposed to a high-humidity environment and the effect from the absorbed water molecule and some relative adsorbates is not negligible. Here, the oxygen and water molecules absorbed on the 6H-SiC(0001) surface and the dissociation process were studied with density functional theory. On the 6H-SiC(0001) surface, absorbed O-2 is spontaneously dissociated into O*, which is absorbed on a hollow site, and further transforms the 6H-SiC(0001) surface into SiO2. The absorbed H2O is spontaneously broken into OH* and H*, which are both absorbed on the top of the Si atom, and OH* is further reversibly transformed into O* and H*. The H* could saturate the dangling Si bond and change the absorption type of O*, which could stabilize the 6H-SiC(0001) surface and prevent it from transforming into SiO2.

Keyword:

Density functional theory H2O absorption Dangling Si bond 6H-SiC(0001) surface Stability

Author Community:

  • [ 1 ] [Fu, Chun-he]China Elect Technol Grp Corp, Res Inst 45, Beijing 100176, Peoples R China
  • [ 2 ] [Lu, Hui-li]Beijing Univ Technol, Coll Environm & Energy Engn, Beijing Key Lab Green Catalysis & Separat, Beijing 100124, Peoples R China
  • [ 3 ] [Sun, Shao-rui]Beijing Univ Technol, Coll Environm & Energy Engn, Beijing Key Lab Green Catalysis & Separat, Beijing 100124, Peoples R China

Reprint Author's Address:

  • 孙少瑞

    [Sun, Shao-rui]Beijing Univ Technol, Coll Environm & Energy Engn, Beijing Key Lab Green Catalysis & Separat, Beijing 100124, Peoples R China

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Source :

CHINESE JOURNAL OF CHEMICAL PHYSICS

ISSN: 1674-0068

Year: 2019

Issue: 4

Volume: 32

Page: 451-456

1 . 0 0 0

JCR@2022

ESI Discipline: PHYSICS;

ESI HC Threshold:123

Cited Count:

WoS CC Cited Count: 4

SCOPUS Cited Count: 5

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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