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The cubic boron nitride thin film was deposited with radio frequency (RF) sputtering system by two-stage deposition process method. The content of c-BN was characterized by Fourier transform infrared (FTIR) sprectroscopy. The transmitted spectrum and reflectance spectrum was measured by UV spectrophotometer. The curve of absorption coefficient α vs hv and optical band gap Eg was calculated, the Eg is almost equal to the results from the empirical formula.
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