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作者:

Zhou, Tao (Zhou, Tao.) | Deng, Jin-Xiang (Deng, Jin-Xiang.) (学者:邓金祥) | Chen, Hao (Chen, Hao.) | Zhang, Yan (Zhang, Yan.) | Chen, Guang-Hua (Chen, Guang-Hua.) | Yang, Ping (Yang, Ping.) | Hao, Wei (Hao, Wei.) | Hou, Bi-Hui (Hou, Bi-Hui.)

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摘要:

The cubic boron nitride thin film was deposited with radio frequency (RF) sputtering system by two-stage deposition process method. The content of c-BN was characterized by Fourier transform infrared (FTIR) sprectroscopy. The transmitted spectrum and reflectance spectrum was measured by UV spectrophotometer. The curve of absorption coefficient α vs hv and optical band gap Eg was calculated, the Eg is almost equal to the results from the empirical formula.

关键词:

Cubic boron nitride Optical properties Semiconducting films Sputtering Thin films

作者机构:

  • [ 1 ] [Zhou, Tao]School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China
  • [ 2 ] [Deng, Jin-Xiang]School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China
  • [ 3 ] [Chen, Hao]School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China
  • [ 4 ] [Zhang, Yan]School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China
  • [ 5 ] [Chen, Guang-Hua]School of Materials Science and Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 6 ] [Yang, Ping]School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China
  • [ 7 ] [Hao, Wei]School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China
  • [ 8 ] [Hou, Bi-Hui]School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China

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来源 :

Journal of Functional Materials

ISSN: 1001-9731

年份: 2006

期: SUPPL.

卷: 37

页码: 273-275

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