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作者:

Li, Zhi-Zhong (Li, Zhi-Zhong.) | Chen, Guang-Hua (Chen, Guang-Hua.) | He, Bin (He, Bin.) | Gao, Zhi-Hua (Gao, Zhi-Hua.) | Zhang, Xiao-Kang (Zhang, Xiao-Kang.) | Ding, Yi (Ding, Yi.) | Zhang, Yan (Zhang, Yan.) | Zhou, Tao (Zhou, Tao.) | Deng, Jin-Xiang (Deng, Jin-Xiang.) (学者:邓金祥)

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摘要:

p-c-BN/p-Si thin film heterojunctions have been fabricated. BN films were deposited on p-type Si wafers using RF reactive sputter, and were doped into n-type semiconductor by implanting ions into them. The energy of implantation of ions is 100 keV, and the dose of implantation is 1015 ions/cm2. The p-c-BN/p-Si thin film heterojunctions have been annealed at the temperature of 800°C. The I-V (current-voltage) characteristics have obvious rectification. The fitting results show that current transporting model for the p-c-BN/p-Si thin film heterojunctions is the same as current-voltage equation of diode and the donor concentration is 2.04 × 1013/cm3 in the c-BN films.

关键词:

Annealing Beryllium Cubic boron nitride Current voltage characteristics Doping (additives) Electric properties Heterojunctions Ion implantation Silicon Substrates Thin films

作者机构:

  • [ 1 ] [Li, Zhi-Zhong]School of Materials Science and Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 2 ] [Chen, Guang-Hua]School of Materials Science and Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 3 ] [He, Bin]School of Materials Science and Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 4 ] [Gao, Zhi-Hua]School of Materials Science and Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 5 ] [Zhang, Xiao-Kang]School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China
  • [ 6 ] [Ding, Yi]School of Physics, Lanzhou University, Lanzhou 730000, China
  • [ 7 ] [Zhang, Yan]School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China
  • [ 8 ] [Zhou, Tao]School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China
  • [ 9 ] [Deng, Jin-Xiang]School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China

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来源 :

Journal of Functional Materials

ISSN: 1001-9731

年份: 2006

期: SUPPL.

卷: 37

页码: 213-215

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