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p-c-BN/p-Si thin film heterojunctions have been fabricated. BN films were deposited on p-type Si wafers using RF reactive sputter, and were doped into n-type semiconductor by implanting ions into them. The energy of implantation of ions is 100 keV, and the dose of implantation is 1015 ions/cm2. The p-c-BN/p-Si thin film heterojunctions have been annealed at the temperature of 800°C. The I-V (current-voltage) characteristics have obvious rectification. The fitting results show that current transporting model for the p-c-BN/p-Si thin film heterojunctions is the same as current-voltage equation of diode and the donor concentration is 2.04 × 1013/cm3 in the c-BN films.
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