Integration of GaN thin films with silicon substrates by fusion bonding and laser lift-off - 文章详情页

作者：

Wang, Ting (Wang, Ting.) | Guo, Xia (Guo, Xia.) (学者：郭霞) | Fang, Yuan (Fang, Yuan.) | Liu, Bin (Liu, Bin.) | Shen, Guangdi (Shen, Guangdi.)

收录：

EI Scopus CSCD

摘要：

GaN　thin　films　grown　on　sapphire　substrates　by　metalorganic　chemical　vapor　deposition　(MOCVD)　are　successfully　bonded　and　transferred　onto　Si　receptor　substrates　using　fusion　bonding　and　laser　lift-off　(LLO)　technique.　GaN/Al2O3　structures　are　joined　to　Si　substrates　by　pressure　bonding　Ti/Au　coated　GaN　surface　onto　Ti/Au　coated　Si　receptor　substrates　at　the　temperature　of　400°C.　KrF　excimer　laser　with　400-mJ/cm2　energy　density,　248-nm　wavelength,　and　30-ns　pulse　width　is　used　to　irradiate　the　wafer　through　the　transparent　sapphire　substrates　and　separate　GaN　films　from　sapphire.　Cross-section　scanning　electron　microscopy　(SEM)　combined　with　energy　dispersive　X-ray　spectrometer　(EDS)　measurements　show　that　Au/Si　solid　solution　is　formed　during　bonding　process.　Atomic　force　microscopy　(AFM)　and　photoluminescence　(PL)　measurements　show　that　the　qualities　of　GaN　films　on　Si　substrates　degrade　little　after　substrates　transfer.

关键词：

Atomic force microscopy Bonding Energy dispersive spectroscopy Excimer lasers Fusion reactions Gallium nitride Metallorganic chemical vapor deposition Photoluminescence Sapphire Scanning electron microscopy Silicon Solid solutions Substrates Surfaces Thin films X ray spectrometers

作者机构：

[ 1 ] [Wang, Ting]Optoelectronic Technology Laboratory, Institute of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China
[ 2 ] [Guo, Xia]Optoelectronic Technology Laboratory, Institute of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China
[ 3 ] [Fang, Yuan]Optoelectronic Technology Laboratory, Institute of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China
[ 4 ] [Liu, Bin]Optoelectronic Technology Laboratory, Institute of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China
[ 5 ] [Shen, Guangdi]Optoelectronic Technology Laboratory, Institute of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China

通讯作者信息：

电子邮件地址：

wtt_135@sohu.com

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