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作者:

Guo, Weiling (Guo, Weiling.) | Tai, Jianpeng (Tai, Jianpeng.) | Liu, Jianpeng (Liu, Jianpeng.) | Sun, Jie (Sun, Jie.)

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EI Scopus SCIE

摘要:

Passive matrix GaN-based micro light-emitting diode (LED) arrays with two resolutions of 32x32 and 128x64 are designed and fabricated, and a micro control unit is used to drive the devices and display Chinese characters. The process of the micro-LED display arrays is systematically optimized, where emphasis has been put on solving two specific technical problems. First, the deep isolation trench is etched in two steps in order to decrease the slope of the isolation trench so as to ease the p electrode to climb. In this way, the otherwise easily broken p metal line is now very reliable. Second, a secondary growth method is employed to deposit SiO2 onto the n metal line as an insulation layer between the p and n electrode layers. Between the two deposition steps, the chips are rotated with a certain angle. Therefore, the probability of pinhole overlap is significantly reduced, and the insulation between the p and n electrode layers is guaranteed. Using the optimized micro-LED process, micro displays are fabricated and their electrical, optical, and thermal characteristics for two different pixel sizes are analyzed. Experiments show that the process optimization above helps realize the outstanding properties of the micro-LED display arrays, increase the device and system reliability. The work will contribute to the implementation of the GaN based micro-LED technologies in real life.

关键词:

GaN micro-LED micro display passive matrix process optimization

作者机构:

  • [ 1 ] [Guo, Weiling]Beijing Univ Technol, Minist Educ, Optoelect Technol Lab, Beijing 100124, Peoples R China
  • [ 2 ] [Tai, Jianpeng]Beijing Univ Technol, Minist Educ, Optoelect Technol Lab, Beijing 100124, Peoples R China
  • [ 3 ] [Liu, Jianpeng]Beijing Univ Technol, Minist Educ, Optoelect Technol Lab, Beijing 100124, Peoples R China
  • [ 4 ] [Sun, Jie]Beijing Univ Technol, Minist Educ, Optoelect Technol Lab, Beijing 100124, Peoples R China
  • [ 5 ] [Sun, Jie]Chalmers Univ Technol, Dept Microtechnol & Nanosci, Quantum Device Phys Lab, S-41296 Gothenburg, Sweden

通讯作者信息:

  • 孙捷

    [Guo, Weiling]Beijing Univ Technol, Minist Educ, Optoelect Technol Lab, Beijing 100124, Peoples R China;;[Sun, Jie]Beijing Univ Technol, Minist Educ, Optoelect Technol Lab, Beijing 100124, Peoples R China;;[Sun, Jie]Chalmers Univ Technol, Dept Microtechnol & Nanosci, Quantum Device Phys Lab, S-41296 Gothenburg, Sweden

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来源 :

JOURNAL OF ELECTRONIC MATERIALS

ISSN: 0361-5235

年份: 2019

期: 8

卷: 48

页码: 5195-5201

2 . 1 0 0

JCR@2022

ESI学科: MATERIALS SCIENCE;

ESI高被引阀值:79

JCR分区:3

被引次数:

WoS核心集被引频次: 17

SCOPUS被引频次: 21

ESI高被引论文在榜: 0 展开所有

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