A　novel　MEMS(micro-electro-mechanical　system)　fatigue　testing　device　based　on　the　electrostatic　force　by　comb　driver　is　proposed,　which　can　be　fabricated　by　means　of　the　typical　surface　micromachining　technology.　The　capacitance　and　the　electrostatic　force　are　analyzed　theoretically　for　the　proposed　arc-shaped　comb　driver.　The　vibrating　process　of　device　is　simulated　utilizing　the　electromechanical　coupled-field　element　by　ANSYS.　The　simulation　results　show　a　good　correction　with　the　theoretical　prediction.　The　results　indicated　that　the　stress　of　sample　can　achieve　the　required　level　for　MEMS　fatigue　testing　under　AC　voltage.　In　addition,　the　range　of　the　used　AC　voltage　is　also　evaluated.