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Various factors responsible for light degradation stability of a-Si:H films, grown by hot filament assisted microwave electron synchrotron resonance chemical vapor deposition (MWECR CVD), were analyzed with Fourier infrared spectroscopy (FTIR) and light degradation curves. The results show that hydrogen content, H-Si bonding modes and hydration movement significantly affect the stability of a-Si material. We found that thin layer of Si crystalline micro-grain grown on a-Si substrate considerably improves the stability.
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