收录：
摘要：
The optical constants, surface structure, thermal and humidity stability of amorphous silicon optical films have been investigated by using regular electron beam evaporation and Ar assisted deposition. It is found that Ar ion bombardment can enhance the refractive index, decrease the roughness and improve the thermal and humidity stability, and but it leads to the narrowing of the bandgap and the increase of the optical absorption.
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来源 ：
Semiconductor Optoelectronics
ISSN： 1001-5868
年份： 2006
期： 6
卷： 27
页码： 740-741,787
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