收录:
摘要:
A micromachining Golay-cell infrared detector using silicon micromachining technology includes a movable sensitive diaphragm. The IR detector has a tiny gas chamber formed by bond with diaphragm-die and hole-die. The movable sensitive diaphragm deflection under pressure resulting from gas expansion is available with planar capacitor between silicon diaphragm electrode and metal electrode. A novel Si/Ti/Au/Au/Ti/Si bonding method based on Au/Si eutectic bonding was presented for forming a gas chamber. The detector was fabricated and responded basically using this bonding method. This method can process selective area bonding and the bond intensity reaches to bulk silicon intensity experimentally.
关键词:
通讯作者信息:
电子邮件地址:
来源 :
China Mechanical Engineering
ISSN: 1004-132X
年份: 2005
期: SUPPL.
卷: 16
页码: 419-421
归属院系: