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作者:

Zhao, Linlin (Zhao, Linlin.) | Xu, Chen (Xu, Chen.) (学者:徐晨) | Yang, Daohong (Yang, Daohong.) | Huo, Wenxiao (Huo, Wenxiao.) | Zhao, Hui (Zhao, Hui.) | Shen, Guangdi (Shen, Guangdi.)

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摘要:

A micromachining Golay-cell infrared detector using silicon micromachining technology includes a movable sensitive diaphragm. The IR detector has a tiny gas chamber formed by bond with diaphragm-die and hole-die. The movable sensitive diaphragm deflection under pressure resulting from gas expansion is available with planar capacitor between silicon diaphragm electrode and metal electrode. A novel Si/Ti/Au/Au/Ti/Si bonding method based on Au/Si eutectic bonding was presented for forming a gas chamber. The detector was fabricated and responded basically using this bonding method. This method can process selective area bonding and the bond intensity reaches to bulk silicon intensity experimentally.

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来源 :

China Mechanical Engineering

ISSN: 1004-132X

年份: 2005

期: SUPPL.

卷: 16

页码: 419-421

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