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作者:

Yao, Li-Ying (Yao, Li-Ying.) | Liu, Bao-An (Liu, Bao-An.) | Chen, Tao (Chen, Tao.) | Liu, Shi-Bing (Liu, Shi-Bing.) (学者:刘世炳) | Zuo, Tie-Chuan (Zuo, Tie-Chuan.)

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摘要:

A cheap PMMA was chosen as the substrate instead of expensive silicon or glass, and a 248-nm excimer laser with flexible and auto character replaced complex lithography as a new fabrication technique. After studying the PMMA ablation principle fabricated by 248-nm excimer laser, a PMMA (40 mm × 63 mm) based micro-flow through polymerace chain reaction (PCR) chip with 20 cycles was fabricated at 19 kV and 18 mm/min parameters. The cross section of the chip microchannel was inverse trapezoid, and its bottom surface roughness was less than 0.5 μm. The microchannel had a width of 104 μm, a depth of 56 μm, and a length of 1040 mm. It cost 57 minutes to finish the total length. Then the chip was bonded together with another cover chip at 105°C, 160 N for 20 min. It could endure 0.85 MPa pressure and seal micro fluid well after sample injection experiment. In the end, it was integrated with the temperature control system. Three micro temperature controllers were chosen to control the temperature and gained ± 0.2°C temperature control precision. The temperature gradients between the three temperature zones were 16.5°C and 22.2°C respectively. This chip could realize PCR reaction.

关键词:

Bonding Excimer lasers Microprocessor chips Laser applications Flow of fluids Temperature control Polymers

作者机构:

  • [ 1 ] [Yao, Li-Ying]College of Laser Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 2 ] [Liu, Bao-An]College of Laser Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 3 ] [Chen, Tao]College of Laser Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 4 ] [Liu, Shi-Bing]College of Laser Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 5 ] [Zuo, Tie-Chuan]College of Laser Engineering, Beijing University of Technology, Beijing 100022, China

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来源 :

Chinese Journal of Lasers

ISSN: 0258-7025

年份: 2005

期: 8

卷: 32

页码: 1137-1142

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