Three　preparation　processes　of　TiNi　SMA　thin　film　were　summarized　and　the　pulsed　laser　deposition　was　emphasized.　The　applications　of　TiNi　SMA　Thin　Films　as　micro-actuation　devices　in　micro-fluid　control　system　and　micro-operation　system　were　introduced.　With　the　development　of　thin　film　preparation　process　and　research　on　its　performance,　SMA　thin　films　would　be　more　widely　applied　in　composite　smart　material/structure　and　design/manufacture　of　MEMS　actuation　and　sensor　devices.