收录:
摘要:
Oxygen injection into environmental scanning electron microscopy (ESEM) effectively reduces or eliminates charging effect on insulating sample surfaces under electron beam irradiation. Secondary electron images clearly indicate that oxygen works much better than water vapor in charge compensation on many insulating surfaces, including metal oxides, Al2O3, metal hydroxides, Al(OH) and biological samples in a pressure ranging from 130 to 600 Pa in ESEM. Current absorption Ia was measured in-situ to understand the mechanism of charge compensation in O2 environment. Under electron beam irradiation, high density of surface electron traps form because electron stimulated desorption results in oxygen depletion and energy band distortion on the surface. However, in oxygen environment, these oxygen vacancies can be easily filled by O ions. As a result, the charging effect can be effectively eliminated.
关键词:
通讯作者信息:
电子邮件地址:
来源 :
Journal of Vacuum Science and Technology
ISSN: 1672-7126
年份: 2005
期: 5
卷: 25
页码: 344-349