Kinetics of growth of AlAs/AlGaAs oxide in cylindrical mesa - 文章详情页

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摘要：

Wet　oxidation　of　AlAs/AlGaAs　is　an　important　step　in　the　process　of　the　oxide-confined　vertical　cavity　surface　emitting　lasers　(VCSELs).　The　kinetics　of　Al0.98Ga0.02As　wet　oxidation　process　are　investigated　in　cylindrically　symmetric　mesa　structure.　We　compare　and　analyze　the　rule　relation　between　the　stripe,　convex　and　concave　mesa,　and　obtain　a　novel　model　which　suits　2D　cylindrical　structure.　The　simulated　data　using　the　novel　formulation　is　in　close　agreement　with　the　experiment　data.

关键词：

Cylinders (shapes) Kinetic theory Mathematical models Oxidation Oxides Semiconducting aluminum compounds Semiconductor lasers Structures (built objects) Two dimensional

作者机构：

[ 1 ] [Dong, Limin]Beijing Optoelectronic Technology Laboratory, Institute of Electronic Information and Engineering, Beijing University of Technology, Beijing 100022, China
[ 2 ] [Guo, Xia]Beijing Optoelectronic Technology Laboratory, Institute of Electronic Information and Engineering, Beijing University of Technology, Beijing 100022, China
[ 3 ] [Qu, Hongwei]Beijing Optoelectronic Technology Laboratory, Institute of Electronic Information and Engineering, Beijing University of Technology, Beijing 100022, China
[ 4 ] [Deng, Jun]Beijing Optoelectronic Technology Laboratory, Institute of Electronic Information and Engineering, Beijing University of Technology, Beijing 100022, China
[ 5 ] [Du, Jinyu]Beijing Optoelectronic Technology Laboratory, Institute of Electronic Information and Engineering, Beijing University of Technology, Beijing 100022, China
[ 6 ] [Zou, Deshu]Beijing Optoelectronic Technology Laboratory, Institute of Electronic Information and Engineering, Beijing University of Technology, Beijing 100022, China
[ 7 ] [Shen, Guangdi]Beijing Optoelectronic Technology Laboratory, Institute of Electronic Information and Engineering, Beijing University of Technology, Beijing 100022, China

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