Fabrication of 980 nm vertical cavity surface emitting lasers - 文章详情页

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摘要：

980　nm　vertical　cavity　surface　emitting　lasers　(VCSELs)　are　fabricated　by　employing　metallorganic　chemical　vapor　deposition　technique　and　AlAs/AlGaAs　selective　wet　nitrogen　oxidation　technique　which　helps　to　realize　the　electric　and　optical　confinement　in　the　VCSEL　devices.　The　effects　of　oxidation　aperture　size　on　the　performance　of　the　VCSEL,　such　as　threshold　current　and　series　resistance,　are　analyzed　through　fabricating　VCSELs　with　different　aperture　size　at　the　same　time.　The　minimum　threshold　current　is　0.8　mA　and　the　maximum　optical　output　power　achieved　is　about　8　mW.

关键词：

Electric currents Fabrication Metallorganic chemical vapor deposition Nitrogen Oxidation Performance Semiconducting aluminum compounds Semiconductor lasers Surfaces

作者机构：

[ 1 ] [Guo, Xia]Beijing Optoelectronic Technology Laboratory, School of Electronic Information and Engineering, Beijing University of Technology, Beijing 100022, China
[ 2 ] [Dong, Limin]Beijing Optoelectronic Technology Laboratory, School of Electronic Information and Engineering, Beijing University of Technology, Beijing 100022, China
[ 3 ] [Qu, Hongwei]Beijing Optoelectronic Technology Laboratory, School of Electronic Information and Engineering, Beijing University of Technology, Beijing 100022, China
[ 4 ] [Da, Xiaoli]Beijing Optoelectronic Technology Laboratory, School of Electronic Information and Engineering, Beijing University of Technology, Beijing 100022, China
[ 5 ] [Du, Jinyu]Beijing Optoelectronic Technology Laboratory, School of Electronic Information and Engineering, Beijing University of Technology, Beijing 100022, China
[ 6 ] [Deng, Jun]Beijing Optoelectronic Technology Laboratory, School of Electronic Information and Engineering, Beijing University of Technology, Beijing 100022, China
[ 7 ] [Shen, Guangdi]Beijing Optoelectronic Technology Laboratory, School of Electronic Information and Engineering, Beijing University of Technology, Beijing 100022, China

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