收录:
摘要:
By using plasma-assisted radio-frequency molecular beam epitaxy, the influence of substrate surface preconditiong and growth temperature on in-plane and polar orientations and surface morphology of ZnO thin films on LSAT(111) substrates are investigated. Rotation domains are observed in ZnO film grown at low temperature, while single-domain O-polar ZnO has been obtained with oxygen radicals pretreatment and high growth temperature. The origin of rotation domains in ZnO thin film is also discussed.
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来源 :
Chinese Journal of Semiconductors
ISSN: 0253-4177
年份: 2005
期: SUPPL.
卷: 26
页码: 82-86
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