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摘要:
Carbon nanotubes were catalytically grown by negative bias-enhanced hot filament chemical vapor deposition at low substrate temperature (550°C) and their growth was investigated by scanning electron microscopy. It is found whether the carbon nanotubes could be orientationally grown at low temperature depended on the plasma power and carbon nanotubes could not be grown if the pressure was too low. The analysis results by the related theory indicate that the interaction of the strong electrical field formed by plasma with the catalyst particles resulted in the orientation growth of carbon nanotubes when the plasma power was large and the diffusion of the particles containing carbon at low pressure was too fast to grow the carbon nanotubes.
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来源 :
Microfabrication Technology
ISSN: 1003-8213
年份: 2005
期: 3
页码: 71-75
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