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作者:

Ren, Zhexuan (Ren, Zhexuan.) | An, Xia (An, Xia.) | Wang, Jianing (Wang, Jianing.) | Li, Gensong (Li, Gensong.) | Zhang, Xingyao (Zhang, Xingyao.) | Zhang, Xing (Zhang, Xing.) | Huang, Ru (Huang, Ru.)

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CPCI-S EI Scopus SCIE

摘要:

The interface quality between the gate dielectric and germanium (Ge) channel plays a crucial role for Ge MOSFETs. The impact of different interface passivation techniques on the total ionizing dose (TID) effect of Ge pMOSFET with enclosed-layout and Al2O3/TiN gate-stack is experimentally investigated under different bias conditions. The N-passivation and O-passivation of Ge pMOSFETs are realized by nitrogen-plasma-passivation (NPP) and rapid-thermal-oxidation, respectively. Negative threshold voltage (Vth) shift and positive Vth shift are observed for devices irradiated under on-state and TG-state, respectively, which are partially due to negative bias temperature instability (NBTI) and positive bias temperature instability (PBTI) stresses. The NBTI and PBTI effects are evaluated to obtain "pure" Vth shifts induced by TID irradiation. The O-passivated Ge pMOSFETs show larger pure radiation-induced Vth shifts than N-passivated devices, which is attributed to less irradiation-induced border trap density in the N-based interfacial layer (IL) than the O-based IL. Therefore, N-based IL is more suitable for Ge MOSFET than the O-based IL from a perspective of radiation hardness. The results may provide interface material-design guideline for radiation-hardened and high-performance Ge MOSFET fabrication.

关键词:

Bias temperature instability (BTI) Ge pMOS interface passivation nitrogen-plasma-passivation (NPP) rapid-thermal-oxidation (RTO) threshold voltage (V-th) shift total ionizing dose (TID)

作者机构:

  • [ 1 ] [Ren, Zhexuan]Peking Univ, Inst Microelect, Key Lab Microelect Devices & Circuits, Beijing 100871, Peoples R China
  • [ 2 ] [An, Xia]Peking Univ, Inst Microelect, Key Lab Microelect Devices & Circuits, Beijing 100871, Peoples R China
  • [ 3 ] [Li, Gensong]Peking Univ, Inst Microelect, Key Lab Microelect Devices & Circuits, Beijing 100871, Peoples R China
  • [ 4 ] [Zhang, Xingyao]Peking Univ, Inst Microelect, Key Lab Microelect Devices & Circuits, Beijing 100871, Peoples R China
  • [ 5 ] [Huang, Ru]Peking Univ, Inst Microelect, Key Lab Microelect Devices & Circuits, Beijing 100871, Peoples R China
  • [ 6 ] [Wang, Jianing]Beijing Univ Technol, Fac Informat Technol, Beijing 100124, Peoples R China
  • [ 7 ] [Zhang, Xing]Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Xinjiang 830011, Peoples R China

通讯作者信息:

  • [An, Xia]Peking Univ, Inst Microelect, Key Lab Microelect Devices & Circuits, Beijing 100871, Peoples R China

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来源 :

IEEE TRANSACTIONS ON NUCLEAR SCIENCE

ISSN: 0018-9499

年份: 2019

期: 7

卷: 66

页码: 1592-1598

1 . 8 0 0

JCR@2022

ESI学科: PHYSICS;

ESI高被引阀值:50

被引次数:

WoS核心集被引频次: 2

SCOPUS被引频次: 2

ESI高被引论文在榜: 0 展开所有

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中文被引频次:

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