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For partly due to the hysteresis nonlinearity of piezoelectric ceramic actuator lead to the problem of the positioning precision, design sliding model inverse compensation control strategy of piezoelectric ceramic actuator based on exponential reaching law. Firstly, the hysteresis characteristics of piezoelectric ceramic are controlled by using preisach inverse model. Secondly, the sliding mode control strategy based on the exponential reaching rate is designed to solve the problems of small error, anti-interference ability and overshoot caused by system compensation control. Moreover, the sliding mode surface with integral part is designed to reduce the steady-state error of the piezoelectric ceramic actuator. The experimental results show that this control strategy improve tracking precision of the system, reduce the overshoot of the system, and has the strong anti-interference ability. Its maximum error is 0.1501 um, tracking error of the mean is 0.0387 um. © 2019 Technical Committee on Control Theory, Chinese Association of Automation.
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