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作者:

Piao, Linhua (Piao, Linhua.) | Piao, Ran (Piao, Ran.) | Ren, Anrun (Ren, Anrun.) | Hu, Yonghui (Hu, Yonghui.)

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EI Scopus

摘要:

This paper reported the design, simulation, fabrication and performance test of fluidic gyroscope, which is fabricated by using the integration process of MEMS process of silicon wafer and high-precision laser cutting and modeling process on PMMA. The 3D transient numerical analysis based on the fluid-structure interaction was used to calculate the flow movement. Calculations and results indicate that sensitivity SFZ is 2.0μV/°/s, the nonlinearity is less than 0.5%. Open flow channel includes two inlets and one outlet inside the sensitive component. With the driving of piezoelectric pump, the fluid flows into the channel through two inlets and gathers together. The flow from the nozzle forms the sensitive jet, without a circulation flow inside the sensitive component. The sensitive component structure is simple. Sensitive jet is deflected along Z-axis by the Coriolis force, the flow exchanges heat with hotwires. Therefore, Wheatstone bridge outputs an unbalanced voltage proportional to angular velocity. © 2018 IEEE.

关键词:

Silicon wafers Angular velocity Channel flow MEMS Fluid structure interaction Gyroscopes Air

作者机构:

  • [ 1 ] [Piao, Linhua]Key Laboratory of Beijing for Sensor, Beijing Information ScienceTechnology University, Beijing, China
  • [ 2 ] [Piao, Ran]Department of Information, Beijing University of Technology, Beijing, China
  • [ 3 ] [Ren, Anrun]Key Laboratory of Beijing for Sensor, Beijing Information ScienceTechnology University, Beijing, China
  • [ 4 ] [Hu, Yonghui]Key Laboratory of Beijing for Sensor, Beijing Information ScienceTechnology University, Beijing, China

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年份: 2018

页码: 1822-1826

语种: 英文

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