• 综合
  • 标题
  • 关键词
  • 摘要
  • 学者
  • 期刊-刊名
  • 期刊-ISSN
  • 会议名称
搜索

作者:

Zhang, Zhiwei (Zhang, Zhiwei.) | Chen, Pei (Chen, Pei.) | Qin, Fei (Qin, Fei.) (学者:秦飞)

收录:

EI Scopus

摘要:

Polycrystalline copper is considered by the industries to be the best TSV electroplating material and other interconnected structure material because of its ultra-low resistivity, high conductivity, low electro-migration rate and good compatibility with the multilayer interconnects process. Its mechanical properties are completely different from the bulk monocrystalline copper, these properties are critically vital to evaluate the thermomechanical reliability of TSV and interconnected structure in 3D packaging. To investigate the effect of the work temperature and grain size on the mechanical properties of polycrystalline Cu, The MD simulations of uniaxial tensile test are performed. The results showed that the elastic modulus gradually increases with the augment of the mean grain size, and the corresponding flow stress concurrently increases, and the flow stress is proportional to the square-root of the grain size, which satisfies the inverse-Hall-Petch relation. It also turned that the elastic modulus decreases with increasing of ambient temperatures, the flow stress is negatively correlated with the temperature. From all the tensile simulation tests, it was confirmed that the mechanism of plastic deformation for polycrystalline copper with 4.65-9.31nm grain sizes is mainly the grain's rotation and grain- boundary sliding, the dislocation nucleation and migration is no longer the dominant factor of plastic deformation. © 2018 IEEE.

关键词:

Copper Dynamics Elastic moduli Electronics packaging Grain boundary sliding Grain size and shape Integrated circuit interconnects Molecular dynamics Plastic deformation Plastic flow Temperature Tensile testing Three dimensional integrated circuits

作者机构:

  • [ 1 ] [Zhang, Zhiwei]Institute of Electronics Packaging Technology and Reliability, College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China
  • [ 2 ] [Chen, Pei]Institute of Electronics Packaging Technology and Reliability, College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China
  • [ 3 ] [Qin, Fei]Institute of Electronics Packaging Technology and Reliability, College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China

通讯作者信息:

电子邮件地址:

查看成果更多字段

相关关键词:

相关文章:

来源 :

年份: 2018

页码: 228-232

语种: 英文

被引次数:

WoS核心集被引频次: 0

SCOPUS被引频次: 2

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

近30日浏览量: 2

在线人数/总访问数:423/2897206
地址:北京工业大学图书馆(北京市朝阳区平乐园100号 邮编:100124) 联系我们:010-67392185
版权所有:北京工业大学图书馆 站点建设与维护:北京爱琴海乐之技术有限公司