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AlxGa1-xAs is a main epitaxial material of 850-nm VCSEL. In order to analyze lattice match and heat production, the band gap of AlxGa1-xAs was built, using the first-principles calculation theory. In addition, based on thermoelectric coupling three-dimensional (3D) finite element method, details on the surface temperature distributions of different 850-nm VCSEL arrays were analyzed. Array spacing and array form have an effect on heat dissipation of VCSEL arrays. The diamond array with 18 light emitting units shows the best thermal stability among others.
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