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In this paper, a micro jet generator that generates multidirectional jets in a closed cavity is proposed. And the design, simulation, experimental verification and manufacture are given. The airflow circulation mechanism in jet generator is explained by the method of combination of a three-dimensional transient numerical calculation based on fluid-solid coupling and constructing PIV experiments. The calculation and experiment show: (1) Two pairs of symmetrical jets which are complete stable and almost identical in orthogonal direction are generated in four jet chambers. The average velocity v of jet at the nozzle orifice 5.52 m/ s. The maximum relative error is less than 0.8%. (2) The measured maximum excitation voltage of the micro jet generator is 30V. The optimum working frequency is 10kHz. The micro jet generator can be used in multi-axis inertial jet sensors, microfluidic control chips and other fields. © 2018 IEEE.
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年份: 2018
页码: 1698-1702
语种: 英文
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