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作者:

Ren, Zhexuan (Ren, Zhexuan.) | An, Xia (An, Xia.) | Wang, Jianing (Wang, Jianing.) | Zhang, Xing (Zhang, Xing.) | Huang, Ru (Huang, Ru.)

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EI Scopus

摘要:

The impact of y-ray exposure on Hot-Carrier effects of 65nm bulk Si NMOSFETs and the dependence on device geometry is experimentally investigated. Experimental results show that stress-induced degradation on irradiated devices is severer than un-irradiated devices. Besides, the geometry dependence of degradation is illustrated: the narrower the device the larger the stress-induced degradation, which is attributed to the radiation-induced trapped charges in STI. The results indicate that the reliability issue of MOS devices is more challenging in harsh environment due to the synergetic effect of TID and HCI. © 2018 IEEE.

关键词:

Electric breakdown MOS devices Hot carriers Semiconductor device manufacture Radiation effects MOSFET devices

作者机构:

  • [ 1 ] [Ren, Zhexuan]Institute of Microelectronics, Peking University, Beijing; 100871, China
  • [ 2 ] [An, Xia]Institute of Microelectronics, Peking University, Beijing; 100871, China
  • [ 3 ] [Wang, Jianing]Faculty of Information Technology, Beijing University of Technology, Beijing; 100124, China
  • [ 4 ] [Zhang, Xing]Institute of Microelectronics, Peking University, Beijing; 100871, China
  • [ 5 ] [Huang, Ru]Institute of Microelectronics, Peking University, Beijing; 100871, China

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年份: 2018

页码: 1-3

语种: 英文

被引次数:

WoS核心集被引频次: 0

SCOPUS被引频次: 5

ESI高被引论文在榜: 0 展开所有

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